Hiroshima Institute of Technology

Researchers Information System

Japanese English

TOP
Search by Faculty
or Department
Search by Keyword
Search by Research
Field
Detailed Search

Hiroshima Institute of Technology top

TANAKA Takeshi

Profile Research field Research achievement

 

Books
No.Title URL, Autour Type, Publisher, Publication date, Range, ISBN 
1
Practical Aspects and Applications of Electron Beam Irradiation , Joint Work, publ. Research Signpost/Transworld Research Network, Jan. 2011, , 978-81-7895-532-2 

 

Works
No.Publication date 
1
Jan. 10, 2021 

 

Reports
No.Title URL, Journal, Vol( No), Start Page- End Page, Publication date 
1
Review of HIT - IE-BAS joint research during the last 25 years , , 55,  95- 100, Feb. 1, 2021 
2
Fabrication of IoT devices with Sigfox, and It’s application to education, research, and society using ThingSpeak, Matlab / Simulink, and Twitter , Bulletin of Hiroshima Institute of Technology. Research volume, 54,  113- 122, Feb. 1, 2020 
3
Construction of a preliminary educational system for fuel cells using hydrogen , Bulletin of Hiroshima Institute of Technology. Education volume, 19,  53- 60, Feb. 1, 2020 
4
Report on Activities of Foundation for Sports Environment General Technical Promotion Meeting in 2018 , Bulletin of Hiroshima Institute of Technology. Research volume, 53,  269- 276, Feb. 1, 2019 
5
The Theoretical and Experimental Estimation about XPS Spectra Using DV-Xα Molecular-Orbital Method and Its Application to Materials Informatics , Bulletin of Hiroshima Institute of Technology. Research volume, 53,  79- 88, Feb. 1, 2019 
6
Construction of a preliminary autonomous energy system using regenerative energy , Bulletin of Hiroshima Institute of Technology. Research volume, 52,  77- 85, Feb. 1, 2018 
7
Construction of communication system with IoT equipment using Sigfox network and its application to education , Bulletin of Hiroshima Institute of Technology. Education volume, 17,  59- 63, Feb. 1, 2018 
8
Measurement of lighting of sports facilities using drone , Bulletin of Hiroshima Institute of Technology. Research volume, 52,  87- 92, Feb. 1, 2018 
9
Outline of foundation for sports environment general technical promotion meeting and activity report , Bulletin of Hiroshima Institute of Technology. Research volume, 52,  187- 194, Feb. 1, 2018 
10
Sports lighting of an arena using LED, and an installation example , Bulletin of Hiroshima Institute of Technology. Research volume, 51,  231- 241, Feb. 1, 2017 
11
Present and Future of the science club at Iinan town , Bulletin of Hiroshima Institute of Technology. Education volume, 14,  39- 46, Feb. 1, 2015 
12
Regional development through it with education and awareness of Applied Physics in the mountainous region , Bulletin of Hiroshima Institute of Technology. Education volume, 13,  23- 31, Feb. 1, 2014 
13
The report of joint research over 20 years of the Bulgarian Academy of Sciences and Hiroshima Institute of Technology , Bulletin of Hiroshima Institute of Technology. Research volume, 48,  105- 114, Feb. 1, 2014 
14
Current status of international standardization in LED lighting focus on East Asia , Bulletin of Hiroshima Institute of Technology. Research volume, 47,  1- 9, Feb. 1, 2013 
15
“School New Deal Plan” and “Decentralization” Green Promotion at Iinan Town in Shimane Prefecture , Bulletin of Hiroshima Institute of Technology. Research volume, 45,  1- 8, Feb. 1, 2011 
16
Basic consecutive system consisted of design, process, and estimation of small scale integrated circuits (SSI) , Bulletin of Hiroshima Institute of Technology. Research volume, 44,  1- 5, Feb. 1, 2010 
17
Fabrication of integrated circuits of “Monozukuri” education associated with system LSI , Bulletin of Hiroshima Institute of Technology. Education volume, 4,  7- 12, Feb. 1, 2005 
18
Approach to high school-University cooperation of “Monozukuri” education associated with system LSI , Bulletin of Hiroshima Institute of Technology. Education volume, 4,  1- 6, Feb. 1, 2005 
19
Development of the integrated circuits for road sign illuminated by using the white light emitting diode with the solar cell , Bulletin of Hiroshima Institute of Technology. Research volume, 37,  1- 4, Feb. 1, 2003 
20
Application of Plasma Enhanced Materials Processing and Rarefild GAS Dynamics Unified Simulation Tools (PEGASUS) to Electromagnetics , Bulletin of Hiroshima Institute of Technology. Education volume, 2,  5- 8, Feb. 1, 2003 
21
Development of the system for checking attendance of the lecture at the university using the card reader , Bulletin of Hiroshima Institute of Technology. Education volume, 2,  1- 3, Feb. 1, 2003 
22
Development of Road Sign Illuminated by Using the White Light Emitting Diode with the Solar Cell , Bulletin of Hiroshima Institute of Technology. Research volume, 36,  9- 12, Feb. 1, 2002 
23
Development of C++ Template Library for Education of LSI Design , Bulletin of Hiroshima Institute of Technology. Education volume, 1,  15- 20, Feb. 1, 2002 

 

Academic papers
No.Title URL, Journal, Vol( No), Start Page- End Page, Publication date, DOI 
1
Feasibility of food processing treatment using plasma-based ion implantation method , Innovations, 11,  22- 25, Mar. 2023,  
2
Basic use of OpenWeatherMap for an IoT system with Sigfox , Industry 4.0, 8( 1), 1- 4, Mar. 2023,  
3
Fundamental research on application of integrated circuit design prototyping system to IoT , , ,  125- 130, Dec. 6, 2022,  
4
Effect of the conductivity of the petri dish placed on the electrode on the surface layer of the spores in the PBII method , , 57( 3-4), 41- 45, Jun. 11, 2022,  
5
The sterilization effect of plasma-based ion implantation on prokaryotic microorganisms , Electrotechnica & Electronica (Е+Е), 57,  46- 50, Jun. 1, 2022,  
6
Education system for IoT device using Sigfox, Matlab, and Thingspeak , , 21,  9- 18, Mar. 4, 2022,  
7
Thin film formation and surface treatment using plasma ion implantation method  , , 56,  145- 154, Mar. 4, 2022,  
8
Feedback control of ozone concentration in a room using an ozone generator and the Internet of Things with built-in sensor , , 57,  24- 30, Mar. 3, 2022,  
9
Development of an IoT device using SigFox, ThingSpeak, and MATLAB/Simulink  , ELECTROTECHNICA & ELECTRONICA, 55( 3-4), 35- 40, Oct. 1, 2020,  
10
In Transmission of environment data with preliminary secret sharing processing using Sigfox , ELECTROTECHNICA & ELECTRONICA, 55( 9-12), 99- 104, Sep. 2020,  
11
IoT device with Global Positioning System using SigFox, ThingSpeak, and Anaconda platform , ELECTROTECHNICA & ELECTRONICA, 55( 5-8), 94- 98, Aug. 31, 2020,  
12
IoT device with Global Positioning System using SigFox, ThingSpeak, and Anaconda platform , ELECTROTECHNICA & ELECTRONICA, 55( 5-8), 94- 98, Jun. 16, 2020,  
13
The Growth of Students Who Started Research before Belonging to Laboratories and its Effects to Other Students  , The transactions of the Institute of Electrical Engineers of Japan. A, 139( 11), 469- 477, Nov. 2019, https://doi.org/10.1541/ieejfms.139.469 
14
Effect of Electron Beam Method on Processing of Titanium Technogenic Material , Metals, 9( 6), 683- 691, Jun. 14, 2019, https://doi.org/10.3390/met9060683 
15
First work on collaboration between high schools and university by holding workshops, Industry 4.0 , Industry 4.0, 4( 2), 92- 95, Apr. 2019,  
16
Construction of a preliminary educational system for file backup system using secret sharing technique , ELECTROTECHNICA & ELECTRONICA, 53( 11-12), 321- 326, Mar. 21, 2018,  
17
Investigation of Tantalum Recycling by Electron Beam Melting , Metals, 6( 287), 1- 13, Nov. 21, 2016, https://doi.org/10.3390/met6110287 
18
IC Design Program for Visual and Intuitive Manufacturing Study in High School Education , Proc. of International conference on Innovative Engineering Technologies (ICIET’2014), ,  42- 47, Dec. 28, 2014, http://dx.doi.org/10.15242/IIE.E1214049 
19
Construction of an elementary education system on semiconductor processes for power devices using TCAD , 2014 IEEE Conference on Energy Conversion (CENCON), ,  43- 48, Dec. 2014, 10.1109/CENCON.2014.6967474 
20
Power electronics education using the integrated circuit consistent education system and TCAD , 2013 IEEE Frontiers in Education Conference (FIE), ,  1456- 1458, Dec. 2013, 10.1109/FIE.2013.6685074 
21
Disinfection and sterilization by using plasma-based ion implantation , ELECTROTECHNICA & ELECTRONICA, 48( 5-6), 268- 272, May. 2012,  
22
Positive-plasma-bias method for plasma-based ion implantation and deposition ,  Surface and Coatings Technology, 204( 18-19), 2881- 2891, Jun. 25, 2010, https://doi.org/10.1016/j.surfcoat.2010.03.004 
23
Computer simulation of resist profiles at electron beam nanolithography , Microelectronics Engineering, 87( 5-8), 1108- 1111, May. 2010,  
24
A simulation model for Chemically Amplified Resist CAMP6 , Microelectronic Engineering, 86( 4-6), 714- 717, Apr. 2009,  
25
Electron and ion beam lithography simulation for sub-quarter-micron patterns ,  Journal of Nanotechnology and its Applications, 2( 1), 32- 47, 2007,  
26
Estimation of nitrogen ion energy calculated using distribution for nitrogen in Si implanted by PBII , Nuclear Instruments and Methods in Physics Research, B242,  371- 373, Jan. 2006,  
27
Plasma-based ion implantation sterilization technique and ion energy estimation , J. Vac. Sci. Technol. , A23( 4), 1018- 1021, Apr. 2005,  
28
Simulation of the energy absorption and the resist development at sub-150 nm ion lithography , Microelectronic Engineering, 78-79,  533- 539, Mar. 2005,  
29
Estimation of plasma density in after-glow region of RF burst plasma based on voltage–current characteristics , Surface & Coatings Technology, 186( 1-2), 53- 56, Aug. 2, 2004,  
30
Generation of self-ignition plasma and extracted ion current in a burst RF inductively coupled plasma of carbon-containing gases , Surface & Coatings Technology, 186( 1-2), 187- 189, Aug. 2, 2004,  
31
Surface modification of PET films by plasma source ion implantation , Polymer Surface Modification: Relevance to Adhesion, 3,  69- 82, Mar. 2004,  
32
X-ray photoelectron spectroscopy and magnetic properties in Fe-SiO2 granular films , J. Applied Physics, 94( 7 ), 4279- 4284, Oct. 2003,  
33
Improvement of oxygen barrier of PET film with diamond-like carbon film by plasma-source ion implantation , Surface & Coatings Technology, 174-175( 9-10), 1033- 1037, Sep. 2003,  
34
Experimental study on a new sterilization process using plasma source ion implantation with N2 gas , J. Vac. Sci. Technol., A21( 4), 1230- 1236, Jul. 2003,  
35
Auger electron spectroscopy of high-speed-deformed Ni/Cu layers , Materials Science and Engineering , A350,  155- 159, Jun. 15, 2003,  
36
Ion current extracted from a self ignition plasma around the target immersed in a pulsed rf ICP methane plasma , Nuclear Instruments and Methods in Physics Research, B206,  817- 819, May. 2003,  
37
Investigation of diamond-like carbon formed on PET film by plasma-source ion implantation using C2H2 and CH4 ,  Nuclear Instruments and Methods in Physics Research, B206,  712- 716, May. 2003,  
38
Control of properties of thin films prepared by rf- dc coupled magnetron sputtering ,  Recent Res. Devel. Vacuum Sci. & Tech, 4,  191- 212, Apr. 2003,  
39
Photoelectron Signal Simulation from Textured Samples with Modified Surface Composition , Surface and Interface Analysis, 34,  597- 600, Sep. 18, 2002,  
40
Improvement of oxygen barrier of PET film by plasma-source ion implantation of carbon , J. Vac. Sci. Technol., A20( 5), 1659- 1662, Sep. 2002,  
41
Diamondlike carbon deposition on plastic films by plasma source ion implantation , J. Vac. Sci. Technol., A20( 3), 625- 633, May. 2002,  
42
Surface analysis of impact compressed Cu-Ni multiplayer , J. of Surface Analysis, 9,  404- 407, Mar. 2002,  
43
Amorphous carbon layer deposition on plastic film by PSII , Thin Solid Films , 420-421,  253- 258, Dec. 2, 2001,  
44
High rate Sputtering for Ni Films by rf-dc coupled magnetron Sputtering system with Multiploar Magnetic Plasma Confinement , J. Vac. Sci. Technol., A19( 4), 1438- 1441, Jul. 2001, 10.1116/1.1351796 
45
Preparation of Co and CoNx thin films by unbalanced r.f. magnetron sputtering(共著) , Vacuum, 62,  293- 296, Jun. 15, 2001,  
46
Effect of d.c. bias on the compositional ratio of WNx thin films prepared by r.f-d.c. coupled magnetron sputtering(共著) , Applied Surface Science, 169-170,  362- 365, Jan. 15, 2001,  
47
Rapid Thermal annealing of CoxN , Materials and Manufacturing Processes, 16,  531- 540, 2001,  
48
Effect of d.c. bias on the deposition rate using r.f. - d.c. coupled magnetron sputtering for SnNx thin films , Vacuum, 59,  764- 770, Nov. 2000,  
49
Effect of d.c. bias voltage on the deposition rate for Ni films by r.f. – d.c. coupled unbalanced-magnetron sputtering , Surface & coating Technology, 133-134,  295- 300, Nov. 2000,  
50
Photoelectron signal simulation from textured samples covered by a thin film(共著) , Surface and Interface Analysis, 62( 2‐3), 552- 556, Sep. 5, 2000, 10.1016/S0042-207X(01)00155-5 
51
Preparation of Co and CoNx thin films by unbalanced r.f. magnetron sputtering ,  J. Vac. Sci. Technol., A18( 4), 1649- 1652, Jul. 2000,  
52
Characterization for SiO2/Si and silicide/Si interface by x-ray photoelectron spectroscopy with the difference method , Journal of the Korean Vacuum Society, 9,  115- 120, 2000,  
53
Photoelectron signal simulation from textured overlayer samples , Surface and Interface Analysis, 30,  552- 556, 2000,  
54
Evaluation of thin film surface topology shapes , Mathematics and Computers in Simulation, 49( 4-5), 275- 283, Sep. 1999,  
55
Preparation of argon-free refractory thin films using RF-DC coupled magnetron sputtering , Vacuum, 53,  37- 39, May. 1999,  
56
Preparation of MgxNi thin films by RF - DC coupled magnetron sputtering , Thin Solid Films, 343-344,  21- 23, Apr. 1999,  
57
Effect of d. c. bias on the growth rate using RF-DC coupled magnetron sputtering for Mg thin films , Thin Solid Films, 343-344,  57- 59, Apr. 1999,  
58
X-ray Photoelectron Profilography , Journal of Surface Analysis, 5( 1), 82- 85, Jan. 1999,  
59
Preparation of TiNx thin films using r. f-d. c. coupled magnetron sputtering in Ar-N2 gas plasma , Thin Solid Films, 317,  93- 95, Apr. 1, 1998,  
60
Preparation of Ta/Mo structure by using r・f-d・c coupled magnetron sputtering(共著) , Thin Solid Films, 312( 1-2), 135- 138, Jan. 1998,  
61
Monte Carlo simulation of argon atoms transport during deposition of W thin films by RF – dc coupled magnetron sputtering , Vacuum, 48( 7-9), 669- 670, Sep. 1997,  
62
Transpanrent, conductive CuI films prepared by rf-dc oupled magnetron sputtering (共著) , Thin Solid Films, 281-282,  179- 181, Aug. 1996,  
63
Growth kinetics of refractory metal thin films sputtered by r.f.-d.c. coupled magnetron Sputtering in Ar or Ne gas plasma (共著) , Vacuum, 46( 8-10), 1059- 1062, Aug. 1995,  
64
Early Stages of Fluorine Enhanced Oxidation of Silicon (共著) , Solid State Electronics, 33,  117- 122, Dec. 1990,  
65
Atomic layer growth of silicon by excimer Laser induced cryogenic chemical vapor deposition (共著) , Appl. Phys. Lett., 56( 15), 1445- 1447, Apr. 9, 1990, https://doi.org/10.1063/1.102493 
66
Degital chemical vapor deposition and etching technologies for semiconductor processing ,  J. Vac. Sci. Technol., A8( 3), 1844- 1850, Mar. 1990,  
67
Selective Growth of Polycrystalline Silicon By Laser Induced cryogenic CVD (共著) , Jpn. J. Appl. Phys., 27( 11), L2149- L2151, Nov. 1, 1988,  
68
Initial Stage of Laser-Induced Selective Chemical Vapor Deposition of Silicon , Jpn. J. Appl. Phys., 26( 12), 2057- 2060, Dec. 1987, https://doi.org/10.1143/JJAP.26.2057 
69
A New X-ray Lithographic Technique Using total Reflection of X-rays from a pattern plate , Jpn. J. Appl. Phys., 26( 3), 487- 491, Mar. 1987,  
70
Demagnified projection printing by a new x-ray lithographic fechnique using no thin film mashs (共著) , Appl. Phys. Lett., 45( 1), 3- 5, Jul. 1, 1984, 10.1063/1.94997 

 

Conference Activities & Talks
No.Title, URL, Presentation date, Vol( No), Start Page- End Page, Publication date 
1
Utilization of Both Free 3DCG Software “Blender” and 3D Printing for Early STEM Education, , Dec. 8, 2020, ,  971- 974, Dec. 8, 2020 
2
A STEM Education Method Utilizing 3DCG Software “Blender", , Dec. 2020, ,  38- 43, Dec. 2020 
3
Construction of a Preliminary Educational System for Fuel Cell Using Hydrogen, , Mar. 2020, ,  126- 129,   
4
POSSIBLE SOLUTION FOR THE RECYCLING OF METAL WASTES THROUGH ELECTRON BEAM MELTING, , Mar. 12, 2018, 1( 3), 84- 87, Mar. 12, 2018 
5
Design and prototype report by 8bit CPU functional block , , Jan. 19, 2017, ECT-17( 1-21), 21- 26, Jan. 19, 2017 
6
Active learning in engineering education: Practical report in basic subjects of electronic information engineering , , Feb. 28, 2016, FIE-16( 1-7.9-16), 29- 34, Feb. 28, 2016 
7
Systematic Approaches to Learning in Department of Electronics and Computer Engineering in Hiroshima Institute of Technology , , Feb. 28, 2016, FIE-16( 1-7.9-16), 79- 84, Feb. 28, 2016 
8
Design of logic circuit and layout for LSI chip of clock , , Jan. 21, 2016, ECT-16( 1-18), 17- 22, Jan. 21, 2016 
9
Interim Report of Education And Effect for Students Who Want to Study Before Belonging to Laboratories , , Dec. 11, 2015, FIE-15( 27-32.34), 33- 38, Dec. 11, 2015 
10
For Training Students Majoring in the Field of Electrical and Electronic Engineering through the Presentations in Domestic Meetings , , Sep. 5, 2015, FIE-15( 11-22), 53- 58, Sep. 5, 2015 
11
Suggestion of an IC design education method for understanding intuitively and feelingly, , Jul. 2013, ,  305- 308, Jul. 2013 
12
Corporate Education for manufacturing (On-the-job training)―Power Electronics― , , Mar. 5, 2013, FIE-13( 1-14), 63- 68, Mar. 5, 2013 
13
Application to Environmental education using facilities at Iinan Town in Shimane Prefecture , , Mar. 5, 2013, FIE-13( 1-14), 69- 74, Mar. 5, 2013 
14
Evaluation and Analysis System electronic device design and fabrication , , Dec. 14, 2012, FIE-12( 35-46), 59- 62, Dec. 14, 2012 
15
Education System for use of electrical energy with storage system , , Sep. 10, 2012, FIE-12( 19-24.26-34), 15- 20, Sep. 10, 2012 
16
Corporate Education for manufacturing―Training organization after the bankruptcy of Lehman Brothers― , , Sep. 10, 2012, FIE-12( 19-24.26-34), 21- 26, Sep. 10, 2012 
17
Linearization of frequency switching process of a CMOS active inductor oscillation circuit , , Mar. 24, 2011, ECT-11( 26-34), 37- 42, Mar. 24, 2011 
18
Measurement of N scale train speed using ultrasonic wave, , Mar. 4, 2011, FIE-11( 1-19), 67- 71, Mar. 4, 2011 
19
The LC voltage controlled oscillator that applies an active inductor , , Jan. 27, 2011, ECT-11( 16-25), 1- 6, Jan. 27, 2011 
20
Corporate Education for manufacturing (semiconductor)-Educational execution and questionnaire survey- , , Sep. 8, 2010, FIE-10( 23-28), 63- 68, Sep. 8, 2010 
21
Questionnaire on practice education consisting of Layout design and verification for CMOS , , Sep. 8, 2010, FIE-10( 23-38), 59- 62, Sep. 8, 2010 
22
Layout design education of an integrated circuit in a high school using Microsoft EXCEL, , Sep. 8, 2010, FIE-10( 23-38), 69- 72, Sep. 8, 2010 
23
LSI Design Education Introducing Prototype Chip, , Mar. 3, 2010, FIE-10( 1-12,14-22), 15- 20, Mar. 3, 2010 
24
Corporate Education for manufacturing (semiconductor)―Create educational materials ― , , Jan. 21, 2010, ECT-10( 1-14), 51- 55, Jan. 21, 2010 
25
Preparation of ozone water supply apparatus , , Nov. 13, 2009, PST-09( 113-126), 5- 8, Nov. 13, 2009 
26
Preliminary simu1ation of plasma for Plasma-based ion implantation sterilization , , Aug. 6, 2009, PST-09( 22-40), 31- 35, Aug. 6, 2009 
27
Consideration of the IC layout design' trial production experiment to a college student , , Jun. 11, 2009, ECT-09( 53-62), 41- 44, Jun. 11, 2009 
28
Experience education teaching material making of electronic information technology of which theme is car electronics. , , Mar. 6, 2009, FIE-09( 1-16), 47- 50, Mar. 6, 2009 
29
Relation between electronic control of the two-wheel inverted models and V cycle development, , Mar. 6, 2009, FIE-09( 1-16), 41- 46, Mar. 6, 2009 
30
Application of MATLAB/simulink model of Two-wheel auto headstand pendulum with the same axis to education , , Sep. 16, 2008, FIE-08( 13-24, 26-29), 37- 42, Sep. 16, 2008 
31
To tackle to the LSI design education of Hiroshima technology research institute , , Nov. 9, 2006, ECT-06( 95-100), 9- 12, Nov. 9, 2006 
32
Construction of the design, process and estimation consistency education systems of 7 segment driver CMOSLSI , , Mar. 3, 2006, FIE-06( 1-18), 73- 76, Mar. 3, 2006 
33
Basic consecutive system consisted of design, process, and estimation of a fundamental integrated circuit system , , Aug. 4, 2005, FIE-05( 18-31), 59- 64, Aug. 4, 2005 
34
Application for high school-University cooperation of ''Monozukuri'' education associated with system LSI , , Aug. 4, 2005, FIE-05( 18-31), 39- 42, Aug. 4, 2005 
35
High resolution RBS depth profile of nitrogen in Si for sterilization process by PBII , , Mar. 3, 2005, PST-05( 1-15,17-19), 1- 5, Mar. 3, 2005 
36
Simulation of implanted ions into PET films process by PBII , , Oct. 22, 2004, PST-04( 70, 72-81), 51- 54, Oct. 22, 2004 
37
Depth profile of nitrogen in Si for sterilization process by PBII , , Jul. 27, 2004, PST-04( 13-29), 45- 49, Jul. 27, 2004 
38
Effect of the shape and setting of needle electrode on the generation of minus ion, , Mar. 13, 2003, PST-03( 1-10), 37- 40, Mar. 13, 2003 
39
Estimation of plasma density in afterglow of RF burst ICP carbon plasma using an equivalent circuit of a pulse modulator for plasma-based ion processing, , Mar. 13, 2003, PST-03( 1-10), 31- 36, Mar. 13, 2003 
40
Introduction of LSI Layout Design to High School Education as Visualized Manufacturing Study, , Nov. 2002, ,  65- 68, Nov. 2002 
41
Estimation of plasma density using an equivalent circuit of a pulse modulator for plasma-based ion implantation, , Oct. 26, 2002, PST-02( 114-123), 37- 42, Oct. 26, 2002 
42
SPICE analysis of the ion current through the target immersed in a burst ICP plasma, , Oct. 26, 2002, PST-02( 114-123), 43- 46, Oct. 26, 2002 
43
Improvement of oxygen barrier of PET film with diamond-like carbon film by plasma-source ion implantation, , Sep. 9, 2002, ,  ThOB3- ThOB3, Sep. 9, 2002 
44
Ion Current Extracted From a Self Ignition Plasma Around The Target Immersed In A Pulsed ICP RF Methane Plasma, , Sep. 1, 2002, ,  P2-035- P2-035, Sep. 1, 2002 
45
Investigation of diamond-like carbon formed on PET film by plasma-source ion implantation using C2H2 and CH4, , Sep. 1, 2002, ,  P2-020- P2-020, Sep. 1, 2002 
46
Amorphous carbon layer deposition on plastic film by PSII, , Apr. 22, 2002, ,  24- 24, Apr. 22, 2002 
47
Surface analysis of impact compressed Cu-Ni multiplayer, , Nov. 19, 2001, ,  54- 54, Nov. 19, 2001 
48
Characterization for SiO2/Si and silicide/Si interface by x-ray photoelectron spectroscopy with difference method, , Nov. 2, 2000, ,  25- 25, Nov. 2, 2000 
49
High rate sputtering for Ni films by r.f.-d.c. coupled magnetron sputtering system with multipolar magnetic plasma confinement, , Oct. 2, 2000, ,  98- 98, Oct. 2, 2000 
50
Rapid Thermal Annealing of CoNx, , Jun. 4, 2000, ,  116- 116, Jun. 4, 2000 
51
Microstructure and Electrical Properties of CoNx Thin Films Deposited by Unbalanced Magnetron Sputtering, , Jun. 4, 2000, ,  114- 115, Jun. 4, 2000 
52
Photoelectron Signal Simulation from Textured Samples Covered by a Thin Film, , Jun. 4, 2000, ,  123- 123, Jun. 4, 2000 
53
Preparation of Co and CoNx thin films by unbalanced r.f. magnetron sputtering, , Oct. 25, 1999, ,  TF-TuA1- TF-TuA1, Oct. 25, 1999 
54
Photoelectron Signal Simulation from Textured Overlayer Samples, , Oct. 4, 1999, ,  TU-TC07- TU-TC07, Oct. 4, 1999 
55
Effect of d.c. bias on the deposition rate using r.f. - d.c. coupled magnetron sputtering for SnNx thin films, , Jun. 16, 1999, ,  211- 212, Jun. 16, 1999 
56
X-ray Photoelectron Profilography, , Oct. 19, 1998, ,  P-2- P-2, Oct. 19, 1998 
57
XPS profilography through angle resolved spectra, , Oct. 1998, ,  36- 41, Oct. 1998 
58
Textured surface analysis by x-ray photoelectron spectroscopy, , Oct. 1998, ,  29- 35, Oct. 1998 
59
Preparation of Argonfree Refractory Thin Films by using RF - DC coupled magnetron sputtering for Mg thin films, , Aug. 31, 1998, ,  178- 178, Aug. 31, 1998 
60
Preparation of TiNx thin films using r.f. - d.c. coupled magnetron sputtering in Ar - N2 gas plasma, , Sep. 23, 1996, ,  15- 15, Sep. 23, 1996 
61
Transparent, conductive CuI films prepared by rf-dc coupled magnetron sputtering, , Sep. 25, 1995, ,  400- 400, Sep. 25, 1995 
62
Effect of deposition rate on DC bias voltage by using RF-DC coupled magnetron sputtering, , Jun. 11, 1994, ,  238- 238, Jun. 11, 1994 
63
PREPARATION OF W AND Mo THIN FILMS BY RF-DC COUPLED MAGNETRON, , Oct. 12, 1992, ,  491- 491, Oct. 12, 1992 
64
Stoichiometry Control in Laser CVD SiO2, , Mar. 1987, ,  247- 254, Mar. 1987 
65
Demagnified Projection Printing By A New-X-ray Lithographic Technology (共著), , Mar. 1984, ,  145- 150,